Microelectron Eng 2010, 87:2411–2415. 10.1016/j.mee.2010.04.016CrossRef 59. Ye X, Liu H, Ding Y, Li H, Lu B: Research on the cast molding process for high quality PDMS molds. Microelectron Eng 2009, 86:310–313. 10.1016/j.mee.2008.10.011CrossRef 60. Schleunitz A, Spreu C, Mäkelä T, Haatainen T, Klukowska A, Schift H: Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol–gel relief on a metal backbone. Microelectron Eng 2011, 88:2113–2116. 10.1016/j.mee.2011.02.019CrossRef 61. Hauser H, Michl B, Kübler V, Schwarzkopf S, Müller C, Hermle M, Bläsi B: Nanoimprint lithography for honeycomb texturing of multicrystalline silicon. Energy Procedia

2011, 8:648–653.CrossRef 62. Odom TW, Love JC, Wolfe DB, Paul KE, Whitesides GM: Selleck Ilomastat Improved pattern PD173074 ic50 transfer in soft lithography using composite stamps. Langmuir 2002, 18:5314–5320. 10.1021/la020169lCrossRef 63. Unno N, Taniguchi J: Fabrication of the metal nano pattern on plastic substrate using roll nanoimprint. Microelectron Eng 2011, 88:2149–2153. 10.1016/j.mee.2011.02.006CrossRef 64. Cannon AH, King WP: Casting metal microstructures

from a flexible and reusable mold. J Micromech Microeng 2009, 19:095016. 10.1088/0960-1317/19/9/095016CrossRef Competing interests The authors declare that they have no competing interests. Authors’ contributions NK did the overall review before 2012 and drafted the manuscript. OSG did the updates of the latest development of NIL after 2012 and helped draft the manuscript and sequence alignment. LTP did the updates of the latest development of mold fabrication

and helped draft the manuscript. KM is the main coordinator of this manuscript and did the revision of the manuscript. All authors read and approved the final manuscript.”
“Background Highly porous Si is a material composed of interconnected Si nanowires and nanocrystals separated by voids [1, 2]. Due to its structure and morphology, it shows much lower thermal conductivity than that of bulk crystalline Si, which is even below the amorphous limit at porosities exceeding 60%. This is attributed to phonon confinement in the Si nanostructures and phonon scattering at porous Si large internal surface. The room temperature thermal conductivity of porous Si was extensively Sorafenib investigated in the literature (see a list in [3]), and the material is now established as an effective low thermal conductivity substrate for Si-based thermal {Selleck Anti-infection Compound Library|Selleck Antiinfection Compound Library|Selleck Anti-infection Compound Library|Selleck Antiinfection Compound Library|Selleckchem Anti-infection Compound Library|Selleckchem Antiinfection Compound Library|Selleckchem Anti-infection Compound Library|Selleckchem Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|Anti-infection Compound Library|Antiinfection Compound Library|buy Anti-infection Compound Library|Anti-infection Compound Library ic50|Anti-infection Compound Library price|Anti-infection Compound Library cost|Anti-infection Compound Library solubility dmso|Anti-infection Compound Library purchase|Anti-infection Compound Library manufacturer|Anti-infection Compound Library research buy|Anti-infection Compound Library order|Anti-infection Compound Library mouse|Anti-infection Compound Library chemical structure|Anti-infection Compound Library mw|Anti-infection Compound Library molecular weight|Anti-infection Compound Library datasheet|Anti-infection Compound Library supplier|Anti-infection Compound Library in vitro|Anti-infection Compound Library cell line|Anti-infection Compound Library concentration|Anti-infection Compound Library nmr|Anti-infection Compound Library in vivo|Anti-infection Compound Library clinical trial|Anti-infection Compound Library cell assay|Anti-infection Compound Library screening|Anti-infection Compound Library high throughput|buy Antiinfection Compound Library|Antiinfection Compound Library ic50|Antiinfection Compound Library price|Antiinfection Compound Library cost|Antiinfection Compound Library solubility dmso|Antiinfection Compound Library purchase|Antiinfection Compound Library manufacturer|Antiinfection Compound Library research buy|Antiinfection Compound Library order|Antiinfection Compound Library chemical structure|Antiinfection Compound Library datasheet|Antiinfection Compound Library supplier|Antiinfection Compound Library in vitro|Antiinfection Compound Library cell line|Antiinfection Compound Library concentration|Antiinfection Compound Library clinical trial|Antiinfection Compound Library cell assay|Antiinfection Compound Library screening|Antiinfection Compound Library high throughput|Anti-infection Compound high throughput screening| devices [4], including flow sensors [5–8], gas sensors [9], accelerometers [10], and thermoelectric devices [11, 12]. An increasing interest is recently devoted to the potential use of porous Si as a thermoelectric material with high figure of merit (ZT), achievable with its low thermal conductivity, combined with an intentional doping to increase its electrical conductivity [13–15].